Specifications of the rotary stage
| Resolution stepper motor (°) | 0.0024 |
|---|---|
| Resolution Encoder (°) | 0.024 |
| Accuracy (°) | 0.37 |
| Repeatability (°) | 0.1 |
| Minimum incremental motion (°) | 0.1 |
| Maximum angular velocity (°·s¯¹) | 100 |
| Maximum angular acceleration (°·s¯²) | 1200 |
| Backlash (°) | 0.04 |